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Ultra-Smooth Surface Preparation Using Gas Cluster Ion Beams

✍ Scribed by Toyoda, Noriaki; Matsui, Shinji; Yamada, Isao

Book ID: 124062631
Publisher: Institute of Pure and Applied Physics
Year: 2002
Tongue: English
Weight: 128 KB
Volume: 41
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.41.4287

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