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Ultra-shallow p+-junction formation in silicon by excimer laser doping: a heat and mass transfer perspective

✍ Scribed by X. Zhang; J.R. Ho; C.P. Grigoropoulos

Book ID
107759854
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
816 KB
Volume
39
Category
Article
ISSN
0017-9310

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