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[Ultra Clean Soc ISSM2000. Ninth International Symposium on Semiconductor Manufacturing - Tokyo, Japan (26-28 Sept. 2000)] Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130) - Energy saving in semiconductor fabs by out-air handling unit performance improvement

✍ Scribed by Suzuki, H.; Hanaoka, H.; Ohkubo, Y.; Yamazaki, Y.; Shirai, Y.; Ohmi, T.

Book ID: 126631897
Publisher: Ultra Clean Soc
Year: 2000
Weight: 372 KB
Category: Article
ISBN-13: 9780780373921
DOI: 10.1109/ISSM.2000.993671

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