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TXRF with synchrotron radiation Analysis of Ni on Si-wafer surfaces

✍ Scribed by P. Wobrauschek; P. Kregsamer; W. Ladisich; C. Streli; S. Pahlke; L. Fabry; S. Garbe; M. Haller; A. Knöchel; M. Radtke

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 188 KB
Volume: 363
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(95)00399-1

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