✦ LIBER ✦
Determination of organic contaminations on Si wafer surfaces by static ToF-SIMS: Improvement of the detection limit with C60+ primary ions
✍ Scribed by Claude Poleunis; Arnaud Delcorte; Patrick Bertrand
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 331 KB
- Volume
- 252
- Category
- Article
- ISSN
- 0169-4332
No coin nor oath required. For personal study only.