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Two types of hot luminescence in Si/SiO2 superlattices

✍ Scribed by A.V. Zayats; Yu.A. Repeyev; D.N. Nikogosyan; E.A. Vinogradov

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
336 KB
Volume
155
Category
Article
ISSN
0375-9601

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Si/SiO 2 superlattices were fabricated by low-pressure chemical vapour deposition. Superlattices of 75-150 nm layer pair thicknesses and having 1-8 layer pairs were investigated in order to evaluate their surface structure and electroluminescent properties. Atomic force microscopy (AFM) studies were