Annealing temperature dependence of Raman scattering in Si/SiO2 superlattice prepared by magnetron sputtering

✍ Scribed by Shihua Huang; Hong Xiao; Sha Shou

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 453 KB
• Volume: 255
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2008.11.069