Two-dimensional simulation of nanoparticle deposition from high-density plasmas on microstructured surfaces

✍ Scribed by Rutkevych, P. P.; Ostrikov, K.; Xu, S.

• Book ID: 111682230
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 523 KB
• Volume: 14
• Category: Article
• ISSN: 1070-664X
• DOI: 10.1063/1.2715918