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Two-dimensional radio-frequency methane plasma simulation: comparison with experiments

✍ Scribed by Bera, K.; Yi, J.W.; Farouk, B.; Lee, Y.H.

Book ID: 114558851
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 264 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.799829

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