Two-dimensional laser interferometric encoder for the soft X-ray scanning microscope at the NSLS

✍ Scribed by D. Shu; D.P. Siddons; H. Rarback; J. Kirz

• Book ID: 107921909
• Publisher: Elsevier Science
• Year: 1988
• Tongue: English
• Weight: 475 KB
• Volume: 266
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/0168-9002(88)90403-2