Two conductor levels block replication for 4 µm period ion implanted devices

✍ Scribed by Magnin, J.; Poirier, M.; Fedeli, J.; Delaye, M.

• Book ID: 114647237
• Publisher: IEEE
• Year: 1984
• Tongue: English
• Weight: 204 KB
• Volume: 20
• Category: Article
• ISSN: 0018-9464
• DOI: 10.1109/tmag.1984.1063285