Tunneling currents through ultra thin HfO2/Al2O3/HfO2triple layer gate dielectrics for advanced MIS devices

✍ Scribed by Hitender Kumar Tyagi; P. J. George

• Book ID: 106398147
• Publisher: Springer US
• Year: 2008
• Tongue: English
• Weight: 248 KB
• Volume: 19
• Category: Article
• ISSN: 0957-4522
• DOI: 10.1007/s10854-008-9679-0