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Tuning of NiSiâSi Schottky barrier heights by sulfur segregation during Ni silicidation

✍ Scribed by Zhao, Q. T.; Breuer, U.; Rije, E.; Lenk, St.; Mantl, S.

Book ID: 121389420
Publisher: American Institute of Physics
Year: 2005
Tongue: English
Weight: 249 KB
Volume: 86
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1863442

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