PtSi dominated Schottky barrier heights of Ni(Pt)Si contacts due to Pt segregation

✍ Scribed by Chan, J.; Balakchiev, M.; Thron, A. M.; Chapman, R. A.; Riley, D.; Song, S. C.; Jain, A.; Blatchford, J.; Shaw, J. B.; van Benthem, K.; Vogel, E. M.; Hinkle, C. L.

• Book ID: 120073894
• Publisher: American Institute of Physics
• Year: 2013
• Tongue: English
• Weight: 924 KB
• Volume: 102
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.4799277