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Tungsten silicide contacts to polycrystalline silicon and silicon–germanium alloys

✍ Scribed by G. Srinivasan; M.F. Bain; S. Bhattacharyya; P. Baine; B.M. Armstrong; H.S. Gamble; D.W. McNeill


Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
122 KB
Volume
114-115
Category
Article
ISSN
0921-5107

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