✦ LIBER ✦
Platinum silicide contact to arsenic-doped polycrystalline silicon: H-C W Huang et al, J appl Phys, 63, 1988, 1111–1116
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 153 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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