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Tunable frequency Gunn diodes fabricated by focused ion beam implantation

โœ Scribed by Lezec, H.J.; Ismail, K.; Mahoney, L.J.; Shepard, M.I.; Antoniadis, D.A.; Melngailis, J.


Book ID
114538387
Publisher
IEEE
Year
1988
Tongue
English
Weight
148 KB
Volume
35
Category
Article
ISSN
0018-9383

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We report the fabncation of metal-semiconductor-metal (MSM) photo detectors on silicon substrates with CoSi2 electrodes. The electrode patterns have been formed by ion beam synthesis applying maskless implantation with a cobalt focused ion beam. Implantation has been carried out with the substrate a