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Tribological properties of adsorbed water layer on silicon surfaces

โœ Scribed by Doo-In Kim; Kwang-Ho Kim; Hyo-Sok Ahn

Book ID
107662292
Publisher
Korean Society for Precision Engineering
Year
2010
Tongue
English
Weight
339 KB
Volume
11
Category
Article
ISSN
1229-8557

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The tribological properties of a nano-patterned Si surface have been investigated in ambient condition by atomic force microscopy (AFM). The pattern, consisting of parallel grooves, was realized on a Si(0 0 1) single crystal via focused ion beam (FIB) milling. The same technique was used to modify a