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Tribological properties of bio-mimetic nano-patterned polymeric surfaces on silicon wafer

โœ Scribed by E.-S. Yoon; R.A. Singh; H. Kong; B. Kim; D.-H. Kim; H.E. Jeong; K.Y. Suh

Publisher
Springer US
Year
2006
Tongue
English
Weight
525 KB
Volume
21
Category
Article
ISSN
1023-8883

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The tribological properties of a nano-patterned Si surface have been investigated in ambient condition by atomic force microscopy (AFM). The pattern, consisting of parallel grooves, was realized on a Si(0 0 1) single crystal via focused ion beam (FIB) milling. The same technique was used to modify a