Influence of substrate bias voltage on s
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Seung Gyun Hong; Se-Hun Kwon; Sang-Won Kang; Kwang Ho Kim
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Article
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2008
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Elsevier Science
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English
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## Arc ion plating Magnetron sputtering Substrate bias voltage Cr-Mo-Si-N coatings were prepared on Si wafer by a hybrid coating system combining arc ion plating and magnetron sputtering at the substrate bias voltage ranging from 0 to -400 V. The results showed that the deposition rate, film micro