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Tribological properties and adhesive strength of DLC coatings prepared under different substrate bias voltages

โœ Scribed by D Sheeja; B.K Tay; S.P Lau; Xu Shi


Book ID
108390620
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
266 KB
Volume
249
Category
Article
ISSN
0043-1648

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## Arc ion plating Magnetron sputtering Substrate bias voltage Cr-Mo-Si-N coatings were prepared on Si wafer by a hybrid coating system combining arc ion plating and magnetron sputtering at the substrate bias voltage ranging from 0 to -400 V. The results showed that the deposition rate, film micro