Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias

✍ Scribed by H.Y. Dai; Y.Q. Wang; X.R. Cheng; C.Y. Zhan; N.K. Huang

• Book ID: 116245105
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 696 KB
• Volume: 258
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.02.039