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Tribological Characteristics of Oxide Layer Formed on TiN Coated Silicon Wafer

✍ Scribed by Chung-Woo Cho; Young-Ze Lee

Book ID
111613906
Publisher
Springer US
Year
2004
Tongue
English
Weight
709 KB
Volume
16
Category
Article
ISSN
1023-8883

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The optoelectronic and mechanical properties of flexible indium tin oxide (ITO) films are critical to the development of flexible optoelectronic devices. To improve the characteristics of the flexible films, the effects of inorganic buffer layers on the optoelectronic and mechanical characteristics