𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Transparent, photocatalytic, titania thin films formed at low temperature

✍ Scribed by Kemmitt, Tim; Al-Salim, Najeh. I.; Lian, Jiaxin; Golovko, Vladimir B.; Ruzicka, Jan-Yves

Book ID
120077821
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
948 KB
Volume
13
Category
Article
ISSN
1567-1739

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Low-Temperature PECVD of Transparent SiO
Low-Temperature PECVD of Transparent SiOxCyHz Thin Films
✍ D. Barreca; A. Gasparotto; C. Maccato; C. Maragno; E. Tondello; G. Rossetto πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 439 KB

## Abstract Hybrid organic/inorganic SiO~__x__~C~__y__~H~__z__~ thin films are prepared on Cu, Si(100), and SiO~2~ substrates by plasma‐enhanced (PE)CVD using tetramethoxysilane (TMOS) as the precursor compound. Depositions are performed from Ar plasmas at temperatures as low as 60 °C, avoiding the