Transparent Conductive ITO/Ag/ITO Multilayer Films Prepared by Low Temperature Process and Physical Properties
β Scribed by Kim, Tae Hoon; Choi, Bo Hye; Park, Jae Soung; Lee, Sang Mun; Lee, Yun Su; Park, Lee Soon
- Book ID
- 127279657
- Publisher
- Taylor and Francis Group
- Year
- 2010
- Tongue
- English
- Weight
- 425 KB
- Volume
- 520
- Category
- Article
- ISSN
- 1542-1406
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π SIMILAR VOLUMES
## Abstract Tantalumβdoped indium tin oxide thin films were deposited by a cosputtering technique with an ITO target and a Ta~2~O~5~ target. The variations of microstructure, electrical and optical properties with substrate temperature and annealing temperature were investigated in some detail. Taβ
Indium-tin-oxide (ITO) thin films and ITO/Ag alloy/ITO multilayered thin films were deposited on glass substrates using a vertical in-line multilayer sputtering system. Ceramic ITO targets were used for the deposition of ITO layers at low substrate temperature of 100 β’ C. It was observed that the s