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Transmission electron microscopy study of ultra-thin SiC layers obtained by rapid thermal carbonization of Si wafers

✍ Scribed by Morales, F. M. ;Molina, S. I. ;Araújo, D. ;Cimalla, V. ;Pezoldt, J. ;Barbadillo, L. ;Hernández, M. J. ;Piqueras, J.

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