The preparation of cross-sectional trans
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Barmak, Katayun ;Rudman, David A. ;Foner, Simon
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Article
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1990
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Wiley (John Wiley & Sons)
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English
β 607 KB
## Abstract We have developed a technique for preparation of crossβsectional transmission electron microscopy samples of reacted and unreacted Nb/al multilayer thin films on sapphire substrates. The choice of substrate was found to be extremely important. Sapphire sputters more slowly than Nb and N