Transmission electron microscopy of iridium silicide contacts for advanced MOSFET structures with Schottky source and drain

✍ Scribed by A. Łaszcz; J. Kątcki; J. Ratajczak; G. Larrieu; E. Dubois; X. Wallart

• Book ID: 116597892
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 178 KB
• Volume: 382
• Category: Article
• ISSN: 0925-8388
• DOI: 10.1016/j.jallcom.2004.03.145