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Transition from amorphous to microcrystalline Si:H: effects of substrate temperature and hydrogen dilution

✍ Scribed by S Ray; S Mukhopadhyay; T Jana; R Carius

Book ID
117145584
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
266 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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## Abstract Columnar growth was observed in the amorphous part of mixed phase layers deposited at very low substrate temperatures. The width of the columns and the layer thickness at which they are first distinguishable in a cross‐sectional transmission electron microscope (X‐TEM) image, about 120