Continuous Measurement of Atomic Force M
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Jason P. Killgore; Roy H. Geiss; Donna C. Hurley
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Article
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2011
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John Wiley and Sons
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English
⚖ 572 KB
The atomic force microscope (AFM) continues to fi nd increasing applications in nanoscale imaging, [ 1 ] metrology, [ 2 ] devices, [ 3 ] and manufacturing. [ 4 ] In these applications, tip size and shape critically affect the accuracy, resolution, and reliability of measurements and processes. [ 5 ]