✦ LIBER ✦

Transient model of wafer temperature in a furnace for semiconductor fabrication process

✍ Scribed by Kinji Mokuya; Ikuo Matsuba; Kuniaki Matsumoto; Akira Yoshinaka

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Characteristics of the transient wafer t

✍ Kinji Mokuya; Ikuo Matsuba; Takaaki Aoshima 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 556 KB

Modeling of photolithography process in

✍ Zhou, Bing-hai ;Pan, Qing-zhi ;Wang, Shi-jin ;Wu, Bin 📂 Article 📅 2007 🏛 Chinese Electronic Periodical Services 🌐 English ⚖ 388 KB

Operations Research in Manufacturing ||

✍ Hong Chen, J. Michael Harrison, Avi Mandelbaum, Ann van Ackere and Lawrence M. W 📂 Article 📅 1988 🏛 INFORMS 🌐 English ⚖ 485 KB

Modeling the process of impurity removal

✍ V. I. Rudakov; A. V. Bashmakov; V. V. Ovcharov 📂 Article 📅 2004 🏛 SP MAIK Nauka/Interperiodica 🌐 English ⚖ 37 KB

Implementation of modeling and simulatio

✍ W. Scholl; J. Domaschke 📂 Article 📅 2000 🏛 IEEE 🌐 English ⚖ 106 KB

A simulated annealing algorithm for inte

✍ D.Y. Sha; Chao-Yang Liu 📂 Article 📅 2003 🏛 Springer 🌐 English ⚖ 488 KB