✦ LIBER ✦
A simulated annealing algorithm for integration of shop floor control strategies in semiconductor wafer fabrication
✍ Scribed by D.Y. Sha; Chao-Yang Liu
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 488 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0268-3768
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