𝔖 Bobbio Scriptorium

✦ LIBER ✦

Transducer and protective PVD-films for applications in microsystem components

✍ Scribed by E. Quandt; H. Holleck

Book ID: 106186343
Publisher: Springer-Verlag
Year: 1998
Tongue: English
Weight: 622 KB
Volume: 5
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s005420050140

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A comparison of Magnetron Sputtered and

A comparison of Magnetron Sputtered and Arc Evaporated PVD thin films for wear applications in multipoint cutting tools

✍ M.G. Fleming; M.S.J. Hashmi 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 974 KB

[IEEE The 13th International Conference

[IEEE The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - Seoul, Korea (June 5-9, 2005)] The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. - MEMS in RF-filter applications: thin film bulk-acoustic-wave technology

✍ Aigner, R. 📂 Article 📅 2005 🏛 IEEE ⚖ 708 KB

Oxidation behaviour of AIN in the presen

Oxidation behaviour of AIN in the presence of oxide and glass for thick film applications : Takashi Yamagughi and Makiko Kageyama. IEEE Trans. Compon. Hybrids mfg Technol.12(3), 402 (1989)

📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 127 KB

117. Investigation of properties and app

117. Investigation of properties and applications for protection of p-n junction of oxide film prepared by the bombardment of silicon by atomic oxygen ions: V M Gusev et al, Radiotekh Elektron, 16 (8), 1971, 1462–1467 (in Russian)

📂 Article 📅 1973 🏛 Elsevier Science 🌐 English ⚖ 128 KB