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Tracking Chemical Kinetics in High-Throughput Systems

✍ Scribed by Hans F. M. Boelens; David Iron; Johan A. Westerhuis; Gadi Rothenberg


Book ID
101832261
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
172 KB
Volume
9
Category
Article
ISSN
0947-6539

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πŸ“œ SIMILAR VOLUMES


High-Throughput Chemical Vapor Depositio
✍ Qi Wang; Fengzhen Liu; Daxing Han πŸ“‚ Article πŸ“… 2004 πŸ› John Wiley and Sons 🌐 English βš– 133 KB

## Abstract **Summary:** Thin‐film Si materials library were fabricated rapidly on glass substrates using the combinatorial hot‐wire CVD technique. We found that the films with high hydrogen dilution become microcrystalline Si, and the films with no and low hydrogen dilution remain in the amorphous