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Toward a methodology for the implementation of energy saving technologies

✍ Scribed by Marie Howland; Peter W. House; H. W. Bruck

Publisher
Springer Netherlands
Year
1977
Tongue
English
Weight
277 KB
Volume
7
Category
Article
ISSN
0049-6979

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✍ C. Lavoie; F.M. d’Heurle; C. Detavernier; C. Cabral Jr. πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 652 KB

In this paper, we review some of the advantages and disadvantages of nickel silicide as a material for the electrical contacts to the source, drain and gate of current and future CMOS devices. We first present some of the limitations imposed on the current cobalt silicide process because of the cons