Touchdown and Pull-in Voltage Behavior of a MEMS Device with Varying Dielectric Properties

✍ Scribed by Yujin Guo, Zhenguo Pan and M. J. Ward

• Book ID: 124900651
• Publisher: Society for Industrial and Applied Mathematics
• Year: 2005
• Tongue: English
• Weight: 878 KB
• Volume: 66
• Category: Article
• ISSN: 0036-1399
• DOI: 10.2307/4096171