Total toxicity equivalents emissions of SF6, CHF3, and CCl2F2 decomposed in a RF plasma environment

✍ Scribed by Ya-Fen Wang; Minliang Shih; Cheng-Hsien Tsai; Perng-Jy Tsai

• Book ID: 116357849
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 185 KB
• Volume: 62
• Category: Article
• ISSN: 0045-6535
• DOI: 10.1016/j.chemosphere.2005.06.036