Tools for nanolithography — accessible for all!

✍ Scribed by Alan Bullock

• Book ID: 104157901
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 448 KB
• Volume: 28
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(97)84511-9

✦ Synopsis

T he Raith company started life in 1980. The founder and current owner Dr Hermann Raith had already gained much experience in the technical development and marketing of electron beam devices. With this background it was possible to take on projects involving the manufacture of attachments which enabled in particular SEM, and in general, other scanning instruments to be used for different unique applications. Later, some of these first instruments found a wider appeal and grew into standard products serving growing markets.

How does it work?

In principle, the pattern is first designed using software either by graphical or digital means.