Tools for nanolithography β accessible f
β
Alan Bullock
π
Article
π
1997
π
Elsevier Science
π
English
β 448 KB
T he Raith company started life in 1980. The founder and current owner Dr Hermann Raith had already gained much experience in the technical development and marketing of electron beam devices. With this background it was possible to take on projects involving the manufacture of attachments which enab