Cover Picture: High-Resolution Soft Lith
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Jason P. Rolland; Erik C. Hagberg; Ginger M. Denison; Kenneth R. Carter; Joseph
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Article
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2004
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John Wiley and Sons
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English
⚖ 56 KB
**High‐performance imprint** lithographic applications are ideally suited for perfluoropolyether‐based elastomers. The cover picture shows sub‐100‐nm sized features replicated by these materials whose successful application comes from their remarkably low surface energy and their high flexibility. T