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Titanium tellurite thick films prepared by electrophoretic deposition and their dielectric properties

✍ Scribed by Xinming Su; Aiying Wu; Paula M. Vilarinho

Book ID
113897970
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
379 KB
Volume
61
Category
Article
ISSN
1359-6462

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Lead zirconate titanate (PZT) thick films have been successfully grown on Pt/Ti-coated (1 0 0) Si substrates by a novel aerosol plasma deposition (APD) method at room temperature. The dielectric constant (K) and loss tangent (tan Ξ΄) of the as-deposited film measured at 100 kHz are 223 and 0.034, res