Titanium nitride coatings obtained using new apparatus for ion beam assisted deposition

✍ Scribed by M. Bonelli; L. Calliari; M. Elena; M.A. Ghabashy; L.A. Guzman; A. Miotello; P.M. Ossi

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 492 KB
• Volume: 49
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90047-z