✦ LIBER ✦
Titanium nitride sputter deposition on to dies using twin ion beams for dynamic material mixing
✍ Scribed by XG Wang; BQ Chen
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 594 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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