TiSixOy as an absorptive shifter for embedded phase-shifting mask in 248 nm and the modification of R-T method for the determination of shifter's n and k

✍ Scribed by Wen-an Loong; Chih-wei Chen; Ya-hui Chang; Cheng-ming Lin; Zheng Cui; Chien-an Lung

• Book ID: 114155753
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 273 KB
• Volume: 41-42
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(98)00027-6