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Tin oxide thin films prepared by aerosol-assisted chemical vapor deposition and the characteristics on gas detection

โœ Scribed by Jun Zhao; Shuxi Wu; Jianqiao Liu; Huan Liu; Shuping Gong; Dongxiang Zhou


Book ID
108265264
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
419 KB
Volume
145
Category
Article
ISSN
0925-4005

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Tin dioxide thin-film gas sensor prepare
โœ L. Bruno; C. Pijolat; R. Lalauze ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 405 KB

Tin dioxide films are elaborated by a chemical vapour deposition (CVD) method. An accurate control of deposition parameters (temperature, total pressure, duration) so that appropriate annealing conditions (duration, temperature) can be used to modify the structural properties of the films : grain si