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Time‐dependent diffusion of ion‐implanted arsenic in thermally grown SiO2

✍ Scribed by Yamaji, Tetsuo; Ichikawa, Fumio


Book ID
118025917
Publisher
American Institute of Physics
Year
1988
Tongue
English
Weight
1018 KB
Volume
64
Category
Article
ISSN
0021-8979

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