Time-of-Flight SIMS depth profiling and imaging of the interface of Al contact to n-type 4H silicon carbide

✍ Scribed by Jacek Rogowski; Andrzej Kubiak

• Book ID: 112206876
• Publisher: John Wiley and Sons
• Year: 2012
• Tongue: English
• Weight: 325 KB
• Volume: 45
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.5051