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Time efficient fabrication of ultra large scale nano dot arrays using electron beam lithography

✍ Scribed by Grebing, Jochen; Faßbender, Jürgen; Erbe, Artur

Book ID: 123270903
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 503 KB
Volume: 97
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2012.05.029

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