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Tilt-Angle Stabilization of Electrostatically Actuated Micromechanical Mirrors Beyond the Pull-In Point

โœ Scribed by Chen, J.; Weingartner, W.; Azarov, A.; Giles, R.C.


Book ID
120379891
Publisher
IEEE
Year
2004
Tongue
English
Weight
539 KB
Volume
13
Category
Article
ISSN
1057-7157

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