Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point

✍ Scribed by Nadal-Guardia, R.; Dehe, A.; Aigner, R.; Castaner, L.M.

• Book ID: 120021531
• Publisher: IEEE
• Year: 2002
• Tongue: English
• Weight: 339 KB
• Volume: 11
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2002.1007404