Significantly decreased production times
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Gordijn, A. ;Schicho, S. ;Muthmann, S. ;Kilper, T. ;Zhu, H. ;Bunte, E. ;Hüpkes,
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Article
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2010
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John Wiley and Sons
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English
⚖ 260 KB
## Abstract Several approaches that lead to shorter production times of a‐Si/µc‐Si tandem cells are combined in this paper: high‐rate sputtering of aluminum‐doped zinc oxide, high‐rate 40 MHz plasma deposition of microcrystalline silicon and reduced i‐layer thicknesses. On standard lab‐type texture