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Throughput optimized a-Si/μc-Si tandem solar cells on sputter-etched ZnO substrates

✍ Scribed by Stefan Klein; Martin Rohde; Susanne Buschbaum; Daniel Severin


Book ID
113914608
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
689 KB
Volume
98
Category
Article
ISSN
0927-0248

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Significantly decreased production times
✍ Gordijn, A. ;Schicho, S. ;Muthmann, S. ;Kilper, T. ;Zhu, H. ;Bunte, E. ;Hüpkes, 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 260 KB

## Abstract Several approaches that lead to shorter production times of a‐Si/µc‐Si tandem cells are combined in this paper: high‐rate sputtering of aluminum‐doped zinc oxide, high‐rate 40 MHz plasma deposition of microcrystalline silicon and reduced i‐layer thicknesses. On standard lab‐type texture